Invention Grant
- Patent Title: Flexible hybrid plasma-semiconductor transistors and arrays
- Patent Title (中): 灵活的混合等离子半导体晶体管和阵列
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Application No.: US13186401Application Date: 2011-07-19
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Publication No.: US08816435B2Publication Date: 2014-08-26
- Inventor: J. Gary Eden , Paul A. Tchertchian , Thomas J. Houlahan , Dane J. Sievers , Benben Li , Clark J. Wagner
- Applicant: J. Gary Eden , Paul A. Tchertchian , Thomas J. Houlahan , Dane J. Sievers , Benben Li , Clark J. Wagner
- Applicant Address: US IL Urbana
- Assignee: The Board of Trustees of the University of Illinois
- Current Assignee: The Board of Trustees of the University of Illinois
- Current Assignee Address: US IL Urbana
- Agency: Greer, Burns & Crain, Ltd.
- Main IPC: H01L27/12
- IPC: H01L27/12

Abstract:
Preferred embodiment flexible and on wafer hybrid plasma semiconductor devices have at least one active solid state semiconductor region; and a plasma generated in proximity to the active solid state semiconductor region(s). Doped solid state semiconductor regions are in a thin flexible solid state substrate, and a flexible non conducting material defining a microcavity adjacent the semiconductor regions. The flexible non conducting material is bonded to the thin flexible solid state substrate, and at least one electrode is arranged with respect to said flexible substrate to generate a plasma in said microcavity, where the plasma will influence or perform a semiconducting function in cooperation with said solid state semiconductor regions. A preferred on-wafer device is formed on a single side of a silicon on insulator wafer and defines the collector (plasma cavity), emitter and base regions on a common side, which provides a simplified and easy to manufacture structure. A preferred embodiment array of flexible hybrid plasma transistors of the invention is an n+pn PBJT fabricated between two flexible sheets. One or both of the flexible sheets is transparent. The overall array structure is planar, and the planarized structure is sealed between the two flexible sheets. Visible or ultraviolet light is emitted during operation by plasma collectors in the array. In preferred embodiments, individual PBJTs in the array serve as sub-pixels of a full-color display.
Public/Granted literature
- US20120104554A1 FLEXIBLE AND ON WAFER HYBRID PLASMA-SEMICONDUCTOR TRANSISTORS Public/Granted day:2012-05-03
Information query
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