Invention Grant
- Patent Title: Process charging protection for split gate charge trapping flash
- Patent Title (中): 分流闸电荷捕捉闪光过程充电保护
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Application No.: US13715705Application Date: 2012-12-14
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Publication No.: US08816438B2Publication Date: 2014-08-26
- Inventor: Chun Chen , Sameer Haddad , Kuo Tung Chang , Mark Ramsbey , Unsoon Kim , Shenqing Fang
- Applicant: Spansion LLC
- Applicant Address: US CA Sunnyvale
- Assignee: Spansion LLC
- Current Assignee: Spansion LLC
- Current Assignee Address: US CA Sunnyvale
- Agency: Sterne, Kessler, Goldstein & Fox P.L.L.C.
- Main IPC: H01L27/115
- IPC: H01L27/115 ; H01L27/02 ; H01L29/792

Abstract:
A semiconductor device and method of making such device is presented herein. The semiconductor device includes a plurality of memory cells, a plurality of p-n junctions, and a metal trace of a first metal layer. Each of the plurality of memory cells includes a first gate disposed over a first dielectric, a second gate disposed over a second dielectric and adjacent to a sidewall of the first gate, a first doped region in the substrate adjacent to the first gate, and a second doped region in the substrate adjacent to the second gate. The plurality of p-n junctions are electrically isolated from the doped regions of each memory cell. The metal trace extends along a single plane between a via to the second gate of at least one memory cell in the plurality of memory cells, and a via to a p-n junction within the plurality of p-n junctions.
Public/Granted literature
- US20140167135A1 Process Charging Protection for Split Gate Charge Trapping Flash Public/Granted day:2014-06-19
Information query
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