Invention Grant
- Patent Title: Image sensor having wave guide and method for manufacturing the same
- Patent Title (中): 具有波导的图像传感器及其制造方法
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Application No.: US13563620Application Date: 2012-07-31
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Publication No.: US08816459B2Publication Date: 2014-08-26
- Inventor: In-Gyun Jeon , Se-Jung Oh , Heui-Gyun Ahn , Jun-Ho Won
- Applicant: In-Gyun Jeon , Se-Jung Oh , Heui-Gyun Ahn , Jun-Ho Won
- Applicant Address: KR Seoul
- Assignee: Siliconfile Technologies Inc.
- Current Assignee: Siliconfile Technologies Inc.
- Current Assignee Address: KR Seoul
- Agency: Kile Park Reed & Houtteman PLLC
- Priority: KR10-2009-0033400 20090417
- Main IPC: H01L31/0232
- IPC: H01L31/0232 ; H01L27/146

Abstract:
An image sensor having a wave guide includes a semiconductor substrate formed with a photodiode and a peripheral circuit region; an anti-reflective layer formed on the semiconductor substrate; an insulation layer formed on the anti-reflective layer; a wiring layer formed on the insulation layer and connected to the semiconductor substrate; at least one interlayer dielectric stacked on the wiring layer; and a wave guide connected to the insulation layer by passing through the interlayer dielectric and the wiring layer which are formed over the photodiode.
Public/Granted literature
- US20120295389A1 IMAGE SENSOR HAVING WAVE GUIDE AND METHOD FOR MANUFACTURING THE SAME Public/Granted day:2012-11-22
Information query
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