Invention Grant
US08816459B2 Image sensor having wave guide and method for manufacturing the same 有权
具有波导的图像传感器及其制造方法

Image sensor having wave guide and method for manufacturing the same
Abstract:
An image sensor having a wave guide includes a semiconductor substrate formed with a photodiode and a peripheral circuit region; an anti-reflective layer formed on the semiconductor substrate; an insulation layer formed on the anti-reflective layer; a wiring layer formed on the insulation layer and connected to the semiconductor substrate; at least one interlayer dielectric stacked on the wiring layer; and a wave guide connected to the insulation layer by passing through the interlayer dielectric and the wiring layer which are formed over the photodiode.
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