Invention Grant
- Patent Title: Pad structure for 3D integrated circuit
- Patent Title (中): 三维集成电路的垫结构
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Application No.: US12119255Application Date: 2008-05-12
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Publication No.: US08816486B2Publication Date: 2014-08-26
- Inventor: Chih-Sheng Tsai , Chung-Hsing Wang
- Applicant: Chih-Sheng Tsai , Chung-Hsing Wang
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: K&L Gates LLP
- Main IPC: H01L23/02
- IPC: H01L23/02 ; H01L23/48

Abstract:
An I/O pad structure in an integrated circuit (IC) comprises a first vertical region in the IC including a top metal layer and one or more semiconductor devices formed thereunder, the top metal layer in the first vertical region serving as a first pad, the semiconductor devices being electrically connected to the first pad, and a second vertical region in the IC next to the first vertical region including the top metal layer and one or more through-silicon-vias (TSVs) formed thereunder, the top metal layer in the second vertical region serving as a second pad, and no semiconductor devices being formed beneath the second pad, the TSVs being electrically connected to the second pad, wherein the first and the second pad are electrically connected through at least one metal layer.
Public/Granted literature
- US20090278251A1 Pad Structure for 3D Integrated Circuit Public/Granted day:2009-11-12
Information query
IPC分类: