Invention Grant
- Patent Title: Two-dimensional comb-drive actuator and manufacturing method thereof
- Patent Title (中): 二维梳驱动致动器及其制造方法
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Application No.: US13115092Application Date: 2011-05-24
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Publication No.: US08816565B2Publication Date: 2014-08-26
- Inventor: Chang-li Hung , Ta-wei Lin
- Applicant: Chang-li Hung , Ta-wei Lin
- Applicant Address: TW Taipei
- Assignee: Opus Microsystems Corporation
- Current Assignee: Opus Microsystems Corporation
- Current Assignee Address: TW Taipei
- Priority: TW099119966A 20100618
- Main IPC: H02N1/00
- IPC: H02N1/00 ; H01L21/02

Abstract:
A two-dimensional comb-drive actuator and manufacturing method thereof are described. The two-dimensional comb-drive actuator includes a supporting base, a frame and a movable body. The supporting base has first comb electrodes and the frame has internal comb electrodes and external comb electrodes. The external comb electrodes of the frame are interdigitated to the first comb electrodes of the supporting base. The movable body has second comb electrodes which are interdigitated to the internal comb electrodes of the frame. The thicknesses of the second comb electrodes of the movable body are unequal to the internal comb electrodes of the frame and the external comb electrodes of the frame are unequal to the first comb electrodes of the supporting base. The two-dimensional comb-drive actuator utilizes a conducting layer for the above-mentioned comb electrodes in order to increase the rotation angle and operation frequency thereof.
Public/Granted literature
- US20110309717A1 TWO-DIMENSIONAL COMB-DRIVE ACTUATOR AND MANUFACTURING METHOD THEREOF Public/Granted day:2011-12-22
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