Invention Grant
US08819926B2 Methods and apparatuses of using metal needle arrays for specimen lift-out and circuit edit
有权
使用金属针阵列进行试样剥离和电路编辑的方法和装置
- Patent Title: Methods and apparatuses of using metal needle arrays for specimen lift-out and circuit edit
- Patent Title (中): 使用金属针阵列进行试样剥离和电路编辑的方法和装置
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Application No.: US13366316Application Date: 2012-02-04
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Publication No.: US08819926B2Publication Date: 2014-09-02
- Inventor: Mehdi M Yazdanpanah , Romaneh Jalilian
- Applicant: Mehdi M Yazdanpanah , Romaneh Jalilian
- Main IPC: H01R43/00
- IPC: H01R43/00

Abstract:
Embodiments of the present invention provide method and apparatus of restoring probes attached to the manipulator in a control environment (e.g. vacuum chamber of an focus ion beam) without a need to open the vacuum chamber. Another embodiment of the present invention teaches construction and application of various shapes of nanoforks from a nanoneedles array inside a FIB vacuum chamber. In another embodiment, the present invention teaches edition and correction of completed and oxide-coated circuit boards by re-nano-wiring using nanoneedles of a nanoneedles array (as nanowire supply), contained in the same controlled space. In this embodiment, individual nanoneedles in a nanoneedle array are manipulated by a manipulator and placed in such a way to make electrical contact between the desired points.
Public/Granted literature
- US20130199034A1 Methods and Apparatuses of Using Metal Needle Arrays for Specimen Lift-Out and Circuit Edit Public/Granted day:2013-08-08
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