Invention Grant
US08819926B2 Methods and apparatuses of using metal needle arrays for specimen lift-out and circuit edit 有权
使用金属针阵列进行试样剥离和电路编辑的方法和装置

  • Patent Title: Methods and apparatuses of using metal needle arrays for specimen lift-out and circuit edit
  • Patent Title (中): 使用金属针阵列进行试样剥离和电路编辑的方法和装置
  • Application No.: US13366316
    Application Date: 2012-02-04
  • Publication No.: US08819926B2
    Publication Date: 2014-09-02
  • Inventor: Mehdi M YazdanpanahRomaneh Jalilian
  • Applicant: Mehdi M YazdanpanahRomaneh Jalilian
  • Main IPC: H01R43/00
  • IPC: H01R43/00
Methods and apparatuses of using metal needle arrays for specimen lift-out and circuit edit
Abstract:
Embodiments of the present invention provide method and apparatus of restoring probes attached to the manipulator in a control environment (e.g. vacuum chamber of an focus ion beam) without a need to open the vacuum chamber. Another embodiment of the present invention teaches construction and application of various shapes of nanoforks from a nanoneedles array inside a FIB vacuum chamber. In another embodiment, the present invention teaches edition and correction of completed and oxide-coated circuit boards by re-nano-wiring using nanoneedles of a nanoneedles array (as nanowire supply), contained in the same controlled space. In this embodiment, individual nanoneedles in a nanoneedle array are manipulated by a manipulator and placed in such a way to make electrical contact between the desired points.
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