Invention Grant
US08819952B2 Control device for a parallel slider device, control method and measuring device using same
有权
并联滑块装置的控制装置，使用该装置的控制方法和测量装置
- Patent Title: Control device for a parallel slider device, control method and measuring device using same
- Patent Title (中): 并联滑块装置的控制装置，使用该装置的控制方法和测量装置
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Application No.: US13261431Application Date: 2010-03-10
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Publication No.: US08819952B2Publication Date: 2014-09-02
- Inventor: Kaoru Naoi , Yoichi Ishizaki , Tatsuhito Inouchi , Masahiro Iwasaki
- Applicant: Kaoru Naoi , Yoichi Ishizaki , Tatsuhito Inouchi , Masahiro Iwasaki
- Applicant Address: JP Kawasaki-shi, Kanagawa
- Assignee: Kuroda Precision Industries Ltd.
- Current Assignee: Kuroda Precision Industries Ltd.
- Current Assignee Address: JP Kawasaki-shi, Kanagawa
- Agency: Marshall & Melhorn, LLC
- International Application: PCT/JP2010/001715 WO 20100310
- International Announcement: WO2011/111101 WO 20110915
- Main IPC: G01B5/25
- IPC: G01B5/25 ; H01L21/67 ; G01B5/00 ; G01B11/30 ; G05B19/19 ; G01B7/34
Abstract:
In a parallel slider device, the two sliders are allowed to move in a smooth manner without interfering with each other. A same position command is given to a front servo controller for a front linear servo motor and a rear servo controller for a rear linear servo motor, and the front servo controller and the rear servo controller are provided with mutually different control gains.
Public/Granted literature
- US20130008042A1 Control Device for a Parallel Slider Device, Control Method Therefor and Measuring Device Using Same Public/Granted day:2013-01-10
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