Invention Grant
- Patent Title: Microelectromechanical z-axis detection structure with low thermal drifts
- Patent Title (中): 具有低热漂移的微机电z轴检测结构
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Application No.: US13888170Application Date: 2013-05-06
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Publication No.: US08820161B2Publication Date: 2014-09-02
- Inventor: Gabriele Cazzaniga , Luca Coronato , Barbara Simoni
- Applicant: STMicroelectronics S.r.l.
- Applicant Address: IT Agrate Brianza
- Assignee: STMicroelectronics S.r.l.
- Current Assignee: STMicroelectronics S.r.l.
- Current Assignee Address: IT Agrate Brianza
- Agency: Seed IP Law Group PLLC
- Priority: ITTO09A0597 20090731
- Main IPC: G01P15/125
- IPC: G01P15/125 ; G01P15/02 ; G01C19/5755 ; G01C19/5769 ; G01C19/5712

Abstract:
A MEMS detection structure is provided with: a substrate having a top surface, on which a first fixed-electrode arrangement is set; a sensing mass, extending in a plane and suspended above the substrate and above the first fixed-electrode arrangement at a separation distance; and connection elastic elements that support the sensing mass so that it is free to rotate out of the plane about an axis of rotation, modifying the separation distance, as a function of a quantity to be detected along an axis orthogonal to the plane. The MEMS detection structure also includes: a coupling mass, suspended above the substrate and connected to the sensing mass via the connection elastic elements; and an anchoring arrangement, which anchors the coupling mass to the substrate with a first point of constraint, set at a distance from the axis of rotation and in a position corresponding to the first fixed-electrode arrangement.
Public/Granted literature
- US20130239686A1 MICROELECTROMECHANICAL Z-AXIS DETECTION STRUCTURE WITH LOW THERMAL DRIFTS Public/Granted day:2013-09-19
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