Invention Grant
- Patent Title: Integrated gas panel apparatus
- Patent Title (中): 集成气体装置
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Application No.: US13479016Application Date: 2012-05-23
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Publication No.: US08820360B2Publication Date: 2014-09-02
- Inventor: Kazuhiro Oya , Tatsuya Hayashi
- Applicant: Kazuhiro Oya , Tatsuya Hayashi
- Applicant Address: JP Kyoto-shi
- Assignee: Horiba STEC, Co., Ltd.
- Current Assignee: Horiba STEC, Co., Ltd.
- Current Assignee Address: JP Kyoto-shi
- Agency: Alleman Hall McCoy Russell & Tuttle LLP
- Priority: JP2006-226874 20060823; JP2006-226970 20060823; JP2006-227224 20060823
- Main IPC: F16K11/20
- IPC: F16K11/20

Abstract:
Provided is an integrated gas panel apparatus which has excellent responsiveness, stabilizes gas concentration, and furthermore, can keep a conventional panel shape as it is. A panel body comprises at least a main flow channel block body for forming a main flow channel, and a branch flow channel block body for forming a branch flow channel. The branch flow channel block bodies are arranged on the both right and left sides to face each other by having the main flow channel block body at the center.
Public/Granted literature
- US20120227848A1 INTEGRATED GAS PANEL APPARATUS Public/Granted day:2012-09-13
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