Invention Grant
- Patent Title: Semiconductor wafer carrier
- Patent Title (中): 半导体晶圆载体
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Application No.: US12617851Application Date: 2009-11-13
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Publication No.: US08820728B2Publication Date: 2014-09-02
- Inventor: Jao Sheng Huang , Ming-Fa Chen
- Applicant: Jao Sheng Huang , Ming-Fa Chen
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Slater and Matsil, L.L.P.
- Main IPC: B23Q3/00
- IPC: B23Q3/00

Abstract:
A system and a method for protecting semiconductor wafers is disclosed. A preferred embodiment comprises a carrier with a central region and an exterior region. The exterior region preferably has a thickness that is greater than the central region, to form a cavity in the carrier. An adhesive is preferably placed into the cavity, and a semiconductor wafer is placed onto the adhesive. The edges of the semiconductor wafer are protected by the raised exterior region as well as the displaced adhesive that at least partially fills the area between the semiconductor wafer and the exterior region of the carrier.
Public/Granted literature
- US20100194014A1 Semiconductor Wafer Carrier Public/Granted day:2010-08-05
Information query
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