Invention Grant
- Patent Title: Temperature sensor and heat treating apparatus
- Patent Title (中): 温度传感器和热处理设备
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Application No.: US13751653Application Date: 2013-01-28
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Publication No.: US08821014B2Publication Date: 2014-09-02
- Inventor: Takanori Saito , Koji Yoshii , Tsutomu Kurihara , Tomoya Okamura
- Applicant: Tokyo Electron Limited , Fenwal Controls of Japan, Ltd.
- Applicant Address: JP Tokyo JP Tokyo
- Assignee: Tokyo Electron Limited,Fenwal Controls of Japan, Ltd.
- Current Assignee: Tokyo Electron Limited,Fenwal Controls of Japan, Ltd.
- Current Assignee Address: JP Tokyo JP Tokyo
- Agency: Bacon & Thomas, PLLC
- Priority: JP2012-027629 20120210
- Main IPC: G01K7/00
- IPC: G01K7/00 ; G01K7/02

Abstract:
A temperature detecting element is fixed reliably at an accurate position to enable improvement in a rising characteristic of a temperature and high-accuracy temperature control. Provided is a temperature sensor including a temperature detecting element detecting a temperature in a branch tube branched from a main tube and a positioning supporting mechanism positioning and supporting the temperature detecting element. Tension is applied to a cord of the temperature detecting element. The positioning supporting mechanism is supported by the tensioned cord to position and support the temperature detecting element. The positioning supporting mechanism includes a supporting tube supporting the temperature detecting element, a positioning member supporting the supporting tube and fixed at a set position, and a tensioner applying tension to the cord of the temperature detecting element.
Public/Granted literature
- US20140211830A1 TEMPERATURE SENSOR AND HEAT TREATING APPARATUS Public/Granted day:2014-07-31
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