Invention Grant
- Patent Title: Continuous deposition apparatus
- Patent Title (中): 连续沉积装置
-
Application No.: US13060224Application Date: 2009-08-21
-
Publication No.: US08821638B2Publication Date: 2014-09-02
- Inventor: Hiroshi Tamagaki , Toshiki Segawa
- Applicant: Hiroshi Tamagaki , Toshiki Segawa
- Applicant Address: JP Kobe-shi
- Assignee: Kobe Steel, Ltd.
- Current Assignee: Kobe Steel, Ltd.
- Current Assignee Address: JP Kobe-shi
- Agency: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2008-217805 20080827
- International Application: PCT/JP2009/064610 WO 20090821
- International Announcement: WO2010/024187 WO 20100304
- Main IPC: C23C16/00
- IPC: C23C16/00 ; C23C14/00 ; C23C14/24 ; C23C14/56

Abstract:
Provided is a continuous deposition apparatus wherein replacement operations of a feeding unit and a take-up unit are easily performed. The continuous deposition apparatus is provided with: a vacuum chamber (1); a deposition roller (2); evaporation sources (7L1, 7L2, 7R) which supply a deposition material to a film substrate from the side of the film substrate which is wound on the deposition roller and on which a coating is to be deposited; a feeding unit (3) which supplies the film substrate to the deposition roller (2); and a take-up unit (4) which takes up the film substrate after the coating is deposited thereon. The vacuum chamber (1) is provided with: an evaporation source opening for carrying out and carrying in the evaporation sources; evaporation source door sections (16L, 16R) which open and close the evaporation source opening; another opening provided for the substrate on which the coating is to be deposited, besides the evaporation source opening, for the purpose of carrying out and carrying in the feeding unit (3) and the take-up unit (4); and door sections (17L, 17R) which are provided for the substrate and open and close the opening provided for the substrate.
Public/Granted literature
- US20110139072A1 CONTINUOUS DEPOSITION APPARATUS Public/Granted day:2011-06-16
Information query
IPC分类: