Invention Grant
US08821735B2 Manufacturing method of a glass substrate for a magnetic disk 有权
用于磁盘的玻璃基板的制造方法

  • Patent Title: Manufacturing method of a glass substrate for a magnetic disk
  • Patent Title (中): 用于磁盘的玻璃基板的制造方法
  • Application No.: US13379864
    Application Date: 2011-03-31
  • Publication No.: US08821735B2
    Publication Date: 2014-09-02
  • Inventor: Yosuke Suzuki
  • Applicant: Yosuke Suzuki
  • Applicant Address: JP Tokyo
  • Assignee: Hoya Corporation
  • Current Assignee: Hoya Corporation
  • Current Assignee Address: JP Tokyo
  • Agency: Sughrue Mion, PLLC
  • Priority: JP2010-085020 20100401
  • International Application: PCT/JP2011/058332 WO 20110331
  • International Announcement: WO2011/125902 WO 20111013
  • Main IPC: G11B5/84
  • IPC: G11B5/84 C03C19/00
Manufacturing method of a glass substrate for a magnetic disk
Abstract:
An object of the invention is to effectively remove particles on the glass substrate surfaces, even in the case wherein abrasive particles having a small particle size is used in the polishing step of the glass substrate and a supersonic treatment is performed at a high frequency at the supersonic cleaning step after the polishing step. In a manufacturing method of a glass substrate for a magnetic disk comprising a polishing step for performing polishing of the glass substrate and a supersonic cleaning step for performing supersonic cleaning of the glass substrate after the polishing step, the polishing step uses abrasive particles having a particle size of 10 nm to 30 nm and a first supersonic cleaning is performed at a frequency of 300 kHz to 1,000 kHz to form secondary particles and then a second supersonic cleaning is performed at a frequency of 30 kHz to 100 kHz in the supersonic cleaning step.
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