Invention Grant
- Patent Title: Method for applying liquid material, device therefor, and program therefor
- Patent Title (中): 液体材料的应用方法,装置及其程序
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Application No.: US12918256Application Date: 2009-02-18
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Publication No.: US08821959B2Publication Date: 2014-09-02
- Inventor: Kazumasa Ikushima
- Applicant: Kazumasa Ikushima
- Applicant Address: JP Tokyo
- Assignee: Musashi Engineering, Inc.
- Current Assignee: Musashi Engineering, Inc.
- Current Assignee Address: JP Tokyo
- Agency: Westerman, Hattori, Daniels & Adrian, LLP
- Priority: JP2008-036628 20080218
- International Application: PCT/JP2009/000649 WO 20090218
- International Announcement: WO2009/104383 WO 20090827
- Main IPC: B05B17/04
- IPC: B05B17/04 ; H01L21/44

Abstract:
A method for applying a liquid material in a specific application amount includes an initial parameter setting step of specifying, as a total pulse number, the number of times both ejection pulse signals and pause pulse signals are sent, specifying the number of ejection pulse signals in the total pulse number, which is needed to achieve the specific application amount, and specifying the remainder of the total pulse number as the pause pulse signals; a correction amount calculation step of measuring, per preset correction period, an ejection amount from the nozzle at the timing of the correction period, and calculating a correction amount for the ejection amount; and an ejection amount correction step of adjusting the number of ejection pulse signals and the number of pause pulse signals on the basis of the correction amount calculated in the correction amount calculation step.
Public/Granted literature
- US08758848B2 Method for applying liquid material, device therefor, and program therefor Public/Granted day:2014-06-24
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