Invention Grant
- Patent Title: MgO-based coating for electrically insulating semiconductive substrates and production method thereof
- Patent Title (中): 用于电绝缘半导体衬底的MgO基涂层及其制造方法
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Application No.: US11664765Application Date: 2005-10-12
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Publication No.: US08821961B2Publication Date: 2014-09-02
- Inventor: Céline Bondoux , Philippe Prene , Philippe Belleville , Robert Jerisian
- Applicant: Céline Bondoux , Philippe Prene , Philippe Belleville , Robert Jerisian
- Applicant Address: FR Paris
- Assignee: Commissariat a l'Energie Atomique
- Current Assignee: Commissariat a l'Energie Atomique
- Current Assignee Address: FR Paris
- Agency: Brinks Gilson & Lione
- Priority: FR0410789 20041013
- International Application: PCT/FR2005/050844 WO 20051012
- International Announcement: WO2006/040499 WO 20060420
- Main IPC: B05D5/12
- IPC: B05D5/12 ; H01L23/58 ; H01L21/469 ; H01L21/02 ; C23C16/40 ; H01L23/532

Abstract:
The present invention relates to a magnesium oxide-based (MgO) inorganic coating intended to electrically insulate semiconductive substrates such as silicon carbide (SiC), and to a method for producing such an insulating coating. The method of the invention comprises the steps of preparing a treatment solution of at least one hydrolysable organomagnesium compound and/or of at least one hydrolysable magnesium salt, capable of forming a homogeneous polymer layer of magnesium oxyhydroxide by hydrolysis/condensation reaction with water; depositing the treatment solution of the hydrolysable organomagnesium compound or of the hydrolysable magnesium salt, onto a surface to form a magnesium oxide-based layer; and densifying the layer formed at a temperature of less than or equal to 1000° C.
Public/Granted literature
- US20080258270A1 Mgo-Based Coating for Electrically Insulating Semiconductive Substrates and Production Method Thereof Public/Granted day:2008-10-23
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