Invention Grant
- Patent Title: Methods of directed self-assembly and layered structures formed therefrom
- Patent Title (中): 定向自组装方法和从其形成的分层结构
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Application No.: US12641959Application Date: 2009-12-18
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Publication No.: US08821978B2Publication Date: 2014-09-02
- Inventor: Joy Cheng , William D. Hinsberg , Hiroshi Ito , Ho-Cheol Kim , Young-Hye Na , Daniel Paul Sanders , Linda Karin Sundberg , Hoa D. Truong , Gregory Michael Wallraff
- Applicant: Joy Cheng , William D. Hinsberg , Ho-Cheol Kim , Young-Hye Na , Daniel Paul Sanders , Linda Karin Sundberg , Hoa D. Truong , Gregory Michael Wallraff , Atsuko Ito
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agent Michael R. Roberts
- Main IPC: B32B3/10
- IPC: B32B3/10 ; G03F7/16 ; G03F7/38 ; G03F7/40 ; G03F7/30

Abstract:
A method of forming a layered structure comprising a domain pattern of a self-assembled material utilizes a negative-tone patterned photoresist layer comprising non-crosslinked developed photoresist. The developed photoresist is not soluble in an organic casting solvent for a material capable of self-assembly. The developed photoresist is soluble in an aqueous alkaline developer and/or a second organic solvent. A solution comprising the material capable of self-assembly and the organic casting solvent is casted on the patterned photoresist layer. Upon removal of the organic casting solvent, the material self-assembles, thereby forming the layered structure.
Public/Granted literature
- US20110147983A1 METHODS OF DIRECTED SELF-ASSEMBLY AND LAYERED STRUCTURES FORMED THEREFROM Public/Granted day:2011-06-23
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