Invention Grant
- Patent Title: Photomask and method for manufacturing the same
- Patent Title (中): 光掩模及其制造方法
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Application No.: US13636699Application Date: 2012-06-08
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Publication No.: US08822105B2Publication Date: 2014-09-02
- Inventor: Dong Ye , Liang Xu
- Applicant: Dong Ye , Liang Xu
- Applicant Address: CN Shenzhen
- Assignee: Shenzhen China Star Optoelectronics Technology Co. Ltd.
- Current Assignee: Shenzhen China Star Optoelectronics Technology Co. Ltd.
- Current Assignee Address: CN Shenzhen
- Agent Mark M. Friedman
- Priority: CN201210162265 20120523
- International Application: PCT/CN2012/076644 WO 20120608
- International Announcement: WO2013/174044 WO 20131128
- Main IPC: G03F1/24
- IPC: G03F1/24

Abstract:
The present invention provides a photo-mask and a method for manufacturing the same. The method for manufacturing the photo-mask comprising: forming a shading pattern layer on a substrate; forming a protecting layer covering the shading pattern layer and the substrate; and; forming a reduced reflection layer on the protecting layer, wherein a refractive index of the protecting layer is greater than a refractive index of the reduced reflection layer. The present invention can mitigate a light reflection problem of a substrate of the conventional photo-mask.
Public/Granted literature
- US20130316269A1 PHOTOMASK AND METHOD FOR MANUFACTURING THE SAME Public/Granted day:2013-11-28
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