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US08822123B2 Polymeric materials and methods for making the polymeric materials 有权
用于制造聚合材料的聚合材料和方法

Polymeric materials and methods for making the polymeric materials
Abstract:
Polymeric materials, methods for making the polymeric materials, and photoresist formulations utilizing the polymeric materials are disclosed. In one aspect, a polymeric material is provided including a condensation product of a reaction mixture comprising an aldehyde with a phenolic monomer composition comprising m-cresol, p-cresol, 3,5-dimethyl phenol, and 2,5-dimethyl phenol. The polymeric material may be further contacted with a photoactive compound and a solvent to form a photoresist formulation.
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