Invention Grant
- Patent Title: Production method of resist composition for lithography
- Patent Title (中): 光刻抗蚀剂组合物的制备方法
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Application No.: US13604270Application Date: 2012-09-05
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Publication No.: US08822128B2Publication Date: 2014-09-02
- Inventor: Motoaki Iwabuchi , Tsutomu Ogihara
- Applicant: Motoaki Iwabuchi , Tsutomu Ogihara
- Applicant Address: JP Tokyo
- Assignee: Shin-Etsu Chemical Co., Ltd.
- Current Assignee: Shin-Etsu Chemical Co., Ltd.
- Current Assignee Address: JP Tokyo
- Agency: Oliff PLC
- Priority: JP2011-234598 20111026
- Main IPC: G03F7/004
- IPC: G03F7/004 ; B01D37/02 ; G03F7/075

Abstract:
The present invention provides a production method of a resist composition for lithography, comprising, at least: a filtering step for filtering a resist composition for lithography by a filter therethrough, wherein in the filtering step, a colloidal, sol is passed through the filter from upstream thereof to adsorb colloidal particles to the filter, and then the resist composition for lithography is passed through the filter, thereby removing fine particles in the resist composition for lithography therefrom. There can be provided a resist composition for lithography capable of decreasing occurrences of defects such as coating defects and pattern defects.
Public/Granted literature
- US20130108957A1 PRODUCTION METHOD OF RESIST COMPOSITION FOR LITHOGRAPHY Public/Granted day:2013-05-02
Information query
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