Invention Grant
US08822128B2 Production method of resist composition for lithography 有权
光刻抗蚀剂组合物的制备方法

Production method of resist composition for lithography
Abstract:
The present invention provides a production method of a resist composition for lithography, comprising, at least: a filtering step for filtering a resist composition for lithography by a filter therethrough, wherein in the filtering step, a colloidal, sol is passed through the filter from upstream thereof to adsorb colloidal particles to the filter, and then the resist composition for lithography is passed through the filter, thereby removing fine particles in the resist composition for lithography therefrom. There can be provided a resist composition for lithography capable of decreasing occurrences of defects such as coating defects and pattern defects.
Public/Granted literature
Information query
Patent Agency Ranking
0/0