Invention Grant
US08822138B2 Composition for forming resist underlayer film for lithography including resin containing alicyclic ring and aromatic ring
有权
用于形成光刻用抗蚀剂下层膜的组合物,包括含有脂环族环和芳环的树脂
- Patent Title: Composition for forming resist underlayer film for lithography including resin containing alicyclic ring and aromatic ring
- Patent Title (中): 用于形成光刻用抗蚀剂下层膜的组合物,包括含有脂环族环和芳环的树脂
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Application No.: US13389682Application Date: 2010-08-11
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Publication No.: US08822138B2Publication Date: 2014-09-02
- Inventor: Tetsuya Shinjo , Hirokazu Nishimaki , Yasushi Sakaida , Keisuke Hashimoto
- Applicant: Tetsuya Shinjo , Hirokazu Nishimaki , Yasushi Sakaida , Keisuke Hashimoto
- Applicant Address: JP Tokyo
- Assignee: Nissan Chemical Industries, Ltd.
- Current Assignee: Nissan Chemical Industries, Ltd.
- Current Assignee Address: JP Tokyo
- Agency: Oliff PLC
- Priority: JP2009-189700 20090819
- International Application: PCT/JP2010/063631 WO 20100811
- International Announcement: WO2011/021555 WO 20110224
- Main IPC: G03F7/11
- IPC: G03F7/11 ; H01L21/027 ; C08G65/332 ; G03F7/09 ; G03F7/075

Abstract:
There is provided a resist underlayer film having both heat resistance and etching selectivity. A composition for forming a resist underlayer film for lithography, comprising a reaction product (C) of an alicyclic epoxy polymer (A) with a condensed-ring aromatic carboxylic acid and monocyclic aromatic carboxylic acid (B). The alicyclic epoxy polymer (A) may include a repeating structural unit of Formula (1): (T is a repeating unit structure containing an alicyclic ring in the polymer main chain; and E is an epoxy group or an organic group containing an epoxy group). The condensed-ring aromatic carboxylic acid and monocyclic aromatic carboxylic acid (B) may include a condensed-ring aromatic carboxylic acid (B1) and a monocyclic aromatic carboxylic acid (B2) in a molar ratio of B1:B2=3:7 to 7:3. The condensed-ring aromatic carboxylic acid (B1) may be 9-anthracenecarboxylic acid and the monocyclic aromatic carboxylic acid (B2) may be benzoic acid.
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