Invention Grant
- Patent Title: Semiconductor light emitting device and method for manufacturing the same
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Application No.: US13665650Application Date: 2012-10-31
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Publication No.: US08822250B2Publication Date: 2014-09-02
- Inventor: Kotaro Zaima , Toru Gotoda , Toshiyuki Oka , Shinya Nunoue
- Applicant: Kotaro Zaima , Toru Gotoda , Toshiyuki Oka , Shinya Nunoue
- Applicant Address: JP Tokyo
- Assignee: Kabushiki Kaisha Toshiba
- Current Assignee: Kabushiki Kaisha Toshiba
- Current Assignee Address: JP Tokyo
- Agency: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2010-046883 20100303
- Main IPC: H01L21/00
- IPC: H01L21/00

Abstract:
Certain embodiments provide a method for manufacturing a semiconductor light emitting device, including: providing a first stack film on a first substrate, the first stack film being formed by stacking a p-type nitride semiconductor layer, an active layer having a multiquantum well structure of a nitride semiconductor, and an n-type nitride semiconductor layer in this order; forming an n-electrode on an upper face of the n-type nitride semiconductor layer; and forming a concave-convex region on the upper face of the n-type nitride semiconductor layer by performing wet etching on the upper face of the n-type nitride semiconductor layer with the use of an alkaline solution, except for a region in which the n-electrode is formed.
Public/Granted literature
- US20130059408A1 SEMICONDUCTOR LIGHT EMITTING DEVICE AND METHOD FOR MANUFACTURING THE SAME Public/Granted day:2013-03-07
Information query
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