Invention Grant
US08822267B2 System in package manufacturing method using wafer-to-wafer bonding
有权
使用晶圆到晶片键合的封装制造方法的系统
- Patent Title: System in package manufacturing method using wafer-to-wafer bonding
- Patent Title (中): 使用晶圆到晶片键合的封装制造方法的系统
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Application No.: US13655036Application Date: 2012-10-18
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Publication No.: US08822267B2Publication Date: 2014-09-02
- Inventor: How Yuan Hwang , Jay Maghirang , Yaohuang Huang , Kim-Yong Goh , Phone Maw Hla , Edmond Soon
- Applicant: STMicroelectronics Pte Ltd.
- Applicant Address: SG Singapore
- Assignee: STMicroelectronics Pte Ltd.
- Current Assignee: STMicroelectronics Pte Ltd.
- Current Assignee Address: SG Singapore
- Agency: Seed IP Law Group PLLC
- Main IPC: H01L21/00
- IPC: H01L21/00

Abstract:
Embodiments of the present disclosure are related to manufacturing system-in-packages at wafer-level. In particular, various embodiments are directed to adhering a first wafer to a second wafer and adhering solder balls to contact pads of the first wafer. In one embodiment, a first wafer having first and second surfaces is provided. The first wafer includes bond pads located on the first surface that are coupled to a respective semiconductor device located in the first wafer. A second wafer having an electrical component located therein is provided. A conductive adhesive is provided on at least one of the first wafer and the second wafer. Conductive balls are provided on the bond pads on the first surface of the first wafer. The conductive balls and the conductive adhesive are heated to cause the conductive balls to adhere to the bond pad and the conductive adhesive to adhere the first wafer to the second wafer.
Public/Granted literature
- US20140113410A1 SYSTEM IN PACKAGE MANUFACTURING METHOD USING WAFER-TO-WAFER BONDING Public/Granted day:2014-04-24
Information query
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