Invention Grant
US08822286B2 Method of fabricating a flash memory comprising a high-K dielectric and a metal gate 有权
制造包括高K电介质和金属栅极的闪速存储器的方法

Method of fabricating a flash memory comprising a high-K dielectric and a metal gate
Abstract:
According to one exemplary embodiment, a method for fabricating a flash memory cell in a semiconductor die includes forming a control gate stack overlying a floating gate stack in a memory region of a substrate, where the floating gate stack includes a floating gate overlying a portion of a dielectric one layer. The floating gate includes a portion of a metal one layer and the dielectric o one layer includes a first high-k dielectric material. The control gate stack can include a control gate including a portion of a metal two layer, where the metal one layer can include a different metal than the metal two layer.
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