Invention Grant
US08822286B2 Method of fabricating a flash memory comprising a high-K dielectric and a metal gate
有权
制造包括高K电介质和金属栅极的闪速存储器的方法
- Patent Title: Method of fabricating a flash memory comprising a high-K dielectric and a metal gate
- Patent Title (中): 制造包括高K电介质和金属栅极的闪速存储器的方法
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Application No.: US14050748Application Date: 2013-10-10
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Publication No.: US08822286B2Publication Date: 2014-09-02
- Inventor: Wei Xia , Xiangdong Chen , Frank Hui
- Applicant: Broadcom Corporation
- Applicant Address: US CA Irvine
- Assignee: Broadcom Corporation
- Current Assignee: Broadcom Corporation
- Current Assignee Address: US CA Irvine
- Agency: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- Main IPC: H01L21/336
- IPC: H01L21/336

Abstract:
According to one exemplary embodiment, a method for fabricating a flash memory cell in a semiconductor die includes forming a control gate stack overlying a floating gate stack in a memory region of a substrate, where the floating gate stack includes a floating gate overlying a portion of a dielectric one layer. The floating gate includes a portion of a metal one layer and the dielectric o one layer includes a first high-k dielectric material. The control gate stack can include a control gate including a portion of a metal two layer, where the metal one layer can include a different metal than the metal two layer.
Public/Granted literature
- US20140038404A1 Flash Memory Utilizing a High-K Metal Gate Public/Granted day:2014-02-06
Information query
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