Invention Grant
- Patent Title: High voltage gate formation
- Patent Title (中): 高压门形成
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Application No.: US13715739Application Date: 2012-12-14
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Publication No.: US08822289B2Publication Date: 2014-09-02
- Inventor: Shenqing Fang , Chun Chen
- Applicant: Spansion LLC
- Applicant Address: US CA Sunnyvale
- Assignee: Spansion LLC
- Current Assignee: Spansion LLC
- Current Assignee Address: US CA Sunnyvale
- Agency: Sterne, Kessler, Goldstein & Fox P.L.L.C.
- Main IPC: H01L29/792
- IPC: H01L29/792 ; H01L27/115

Abstract:
Embodiments described herein generally relate to methods of manufacturing charge-trapping memory by patterning the high voltage gates before other gates are formed. One advantage of such an approach is that a thin poly layer may be used to form memory and low voltage gates while protecting high voltage gates from implant penetration. One approach to accomplishing this is to dispose the layer of poly, and then dispose a mask and a thick resist to pattern the high voltage gates. In this manner, the high voltage gates are formed before either the low voltage gates or the memory cells.
Public/Granted literature
- US20140167137A1 High Voltage Gate Formation Public/Granted day:2014-06-19
Information query
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