Invention Grant
- Patent Title: High voltage device
- Patent Title (中): 高压设备
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Application No.: US13598605Application Date: 2012-08-29
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Publication No.: US08822291B2Publication Date: 2014-09-02
- Inventor: Guowei Zhang , Purakh Raj Verma
- Applicant: Guowei Zhang , Purakh Raj Verma
- Applicant Address: SG Singapore
- Assignee: Globalfoundries Singapore Pte. Ltd.
- Current Assignee: Globalfoundries Singapore Pte. Ltd.
- Current Assignee Address: SG Singapore
- Agency: Horizon IP Pte. Ltd.
- Main IPC: H01L21/336
- IPC: H01L21/336 ; H01L29/66

Abstract:
A method of forming a device is disclosed. A substrate having a device region is provided. The device region comprises a source region, a gate and a drain region defined thereon. A drift well is formed in the substrate adjacent to a second side of the gate. The drift well underlaps a portion of the gate with a first edge of the drift well beneath the gate. A secondary portion is formed in the drift well. The secondary portion underlaps a portion of the gate with a first edge of the secondary portion beneath the gate. The first edge of the secondary portion is offset from the first edge of the drift well. A gate dielectric of the gate comprises a first portion having a first thickness and a second portion having a second thickness. The second portion is over the secondary portion.
Public/Granted literature
- US20130181287A1 HIGH VOLTAGE DEVICE Public/Granted day:2013-07-18
Information query
IPC分类: