Invention Grant
- Patent Title: Method for improving write margins of SRAM cells
- Patent Title (中): 提高SRAM单元写入裕度的方法
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Application No.: US13721071Application Date: 2012-12-20
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Publication No.: US08822294B2Publication Date: 2014-09-02
- Inventor: Liujiang Yu
- Applicant: Shanghai Huali Microelectronics Corporation
- Applicant Address: CN Shanghai
- Assignee: Shanghai Huali Microelectronics Corporation
- Current Assignee: Shanghai Huali Microelectronics Corporation
- Current Assignee Address: CN Shanghai
- Agency: Anova Law Group, PLLC
- Priority: CN201210093940 20120331
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L27/11 ; H01L21/28 ; H01L27/02

Abstract:
The present invention provides a method for improving the write margins of the SRAM cells. The method comprises: before etching a polysilicon layer to form the polysilicon gates, performing a pre-implantation process to the polysilicon layer; wherein the polysilicon layer defines SRAM NMOSFETs regions and SRAM PMOSFETs regions; wherein the pre-implantation process comprises pre-implanting the fifth-group elements to the SRAM NMOSFETs regions and the NMOSFETs regions except to the SRAM NMOSFETs regions in the polysilicon layer, and pre-implanting the third-group elements to the PMOSFETs regions excluding the SRAM PMOSFETs regions in the polysilicon layer; wherein the process of pre-implanting the third-group elements comprises forming a pre-implantation photo mask capable of covering the SRAM PMOSFETs regions and using the pre-implantation photo mask to pre-implanting the third-group elements.
Public/Granted literature
- US20130260542A1 METHOD FOR IMPROVING WRITE MARGINS OF SRAM CELLS Public/Granted day:2013-10-03
Information query
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