Invention Grant
- Patent Title: Method of manufacturing non-volatile memory
- Patent Title (中): 制造非易失性存储器的方法
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Application No.: US13610875Application Date: 2012-09-12
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Publication No.: US08822319B2Publication Date: 2014-09-02
- Inventor: Cheng-Yen Shen , Wein-Town Sun
- Applicant: Cheng-Yen Shen , Wein-Town Sun
- Applicant Address: TW Hsinchu
- Assignee: eMemory Technology Inc.
- Current Assignee: eMemory Technology Inc.
- Current Assignee Address: TW Hsinchu
- Agency: Jianq Chyun IP Office
- Main IPC: H01L21/28
- IPC: H01L21/28

Abstract:
A method of manufacturing a non-volatile memory is provided. A substrate includes a memory cell region and a first periphery circuit region. The memory cell region includes a select transistor region. A first gate dielectric layer having a first thickness is formed on the substrate in the first periphery circuit region and the select transistor region. A portion of the first gate dielectric layer on the select transistor region is removed to form a second gate dielectric layer. The second dielectric layer has a second thickness, wherein the second thickness is less than the first thickness.
Public/Granted literature
- US20140073126A1 METHOD OF MANUFACTURING NON-VOLATILE MEMORY Public/Granted day:2014-03-13
Information query
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