Invention Grant
US08822338B2 CVD apparatus and method of forming semiconductor superlattice structure using the same
有权
CVD装置及使用其形成半导体超晶格结构的方法
- Patent Title: CVD apparatus and method of forming semiconductor superlattice structure using the same
- Patent Title (中): CVD装置及使用其形成半导体超晶格结构的方法
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Application No.: US13276729Application Date: 2011-10-19
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Publication No.: US08822338B2Publication Date: 2014-09-02
- Inventor: Jong Sun Maeng , Ki Sung Kim , Bum Joon Kim , Suk Ho Yoon , Hyun Seok Ryu , Sung Tae Kim
- Applicant: Jong Sun Maeng , Ki Sung Kim , Bum Joon Kim , Suk Ho Yoon , Hyun Seok Ryu , Sung Tae Kim
- Applicant Address: KR Suwon-Si
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Suwon-Si
- Agency: McDermott Will & Emery LLP
- Priority: KR10-2011-0000535 20110104
- Main IPC: H01L21/44
- IPC: H01L21/44

Abstract:
Provided is a chemical vapor deposition (CVD) apparatus, including: a reaction chamber including an inner pipe having an internal space, and an external pipe configured to cover the inner pipe so as to maintain a sealing state thereof; a wafer holder disposed within the inner pipe and receiving a plurality of wafers stacked therein; and a gas supplier including at least one stem pipe disposed at the outside of the reaction chamber so as to supply a reactive gas thereto, a plurality of branch pipes connected to the stem pipe to introduce the reactive gas from the outside of the reaction chamber into the reaction chamber, and a plurality of spray nozzles provided with the branch pipes to spray the reactive gas to the plurality of respective wafers.
Public/Granted literature
- US20120171815A1 CVD APPARATUS AND METHOD OF FORMING SEMICONDUCTOR SUPERLATTICE STRUCTURE USING THE SAME Public/Granted day:2012-07-05
Information query
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