Invention Grant
- Patent Title: Systems and methods for forming a time-averaged line image
- Patent Title (中): 用于形成时间平均线图像的系统和方法
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Application No.: US13199016Application Date: 2011-08-17
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Publication No.: US08822353B2Publication Date: 2014-09-02
- Inventor: Serguei Anikitchev , James T. McWhirter , Joseph E. Gortych
- Applicant: Serguei Anikitchev , James T. McWhirter , Joseph E. Gortych
- Applicant Address: US CA San Jose
- Assignee: Ultratech, Inc.
- Current Assignee: Ultratech, Inc.
- Current Assignee Address: US CA San Jose
- Agency: Opticus IP Law PLLC
- Main IPC: B23K26/00
- IPC: B23K26/00 ; H01L21/268 ; B23K26/073

Abstract:
Systems and methods for forming a time-averaged line image having a relatively high amount of intensity uniformity along its length is disclosed. The method includes forming at an image plane a line image having a first amount of intensity non-uniformity in a long-axis direction and forming a secondary image that at least partially overlaps the primary image. The method also includes scanning the secondary image over at least a portion of the primary image and in the long-axis direction according to a scan profile to form a time-average modified line image having a second amount of intensity non-uniformity in the long-axis direction that is less than the first amount. For laser annealing a semiconductor wafer, the amount of line-image overlap for adjacent scans of a wafer scan path is substantially reduced, thereby increasing wafer throughput.
Public/Granted literature
- US20120100728A1 Systems and methods for forming a time-averaged line image Public/Granted day:2012-04-26
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