Invention Grant
- Patent Title: Method and apparatus for control of a plasma for spectrometry
- Patent Title (中): 用于光谱测定的等离子体的控制方法和装置
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Application No.: US14074824Application Date: 2013-11-08
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Publication No.: US08822948B1Publication Date: 2014-09-02
- Inventor: Stephen Hartwell
- Applicant: Thermo Electron Manufacturing Limited
- Applicant Address: GB Cambridge
- Assignee: Thermo Electron Manufacturing Limited
- Current Assignee: Thermo Electron Manufacturing Limited
- Current Assignee Address: GB Cambridge
- Agent Charles B. Katz
- Priority: GB1304701.4 20130315
- Main IPC: C23C14/54
- IPC: C23C14/54 ; C23C8/36 ; H01L21/203
Abstract:
A method of and apparatus for controlling the temperature of an inductively coupled or microwave induced plasma for optical emission spectrometry or mass spectrometry in which the intensities of two spectral lines of radiation emitted by the plasma are measured, and the power provided to sustain the plasma is adjusted so that the ratio of the intensities remains substantially constant.
Public/Granted literature
- US20140264000A1 METHOD AND APPARATUS FOR CONTROL OF A PLASMA FOR SPECTROMETRY Public/Granted day:2014-09-18
Information query
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