Invention Grant
- Patent Title: Non-volatile memory element and manufacturing method thereof
- Patent Title (中): 非易失性存储元件及其制造方法
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Application No.: US14038623Application Date: 2013-09-26
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Publication No.: US08822972B2Publication Date: 2014-09-02
- Inventor: Ryutaro Yasuhara , Takeki Ninomiya , Takeshi Takagi
- Applicant: Panasonic Corporation
- Applicant Address: JP Osaka
- Assignee: Panasonic Corporation
- Current Assignee: Panasonic Corporation
- Current Assignee Address: JP Osaka
- Agency: McDermott Will & Emery LLP
- Priority: JP2012-211751 20120926
- Main IPC: H01L47/00
- IPC: H01L47/00 ; H01L45/00

Abstract:
A non-volatile memory element including a first electrode; a second electrode; and a variable resistance layer. The variable resistance layer including, when a first metal is M and a second metal is N: a third metal oxide layer NOz; a second metal oxide layer NOy; and a first metal oxide layer MOx such that the third, second and first metal oxide layers are stacked in this order; wherein when an oxygen content atomic percentage of an oxide of the first metal M in a stoichiometric state is A, an oxygen content atomic percentage of an oxide of the second metal N in a stoichiometric state is B, an oxygen content atomic percentage of MOx is C, an oxygen content atomic percentage of NOy is D, and an oxygen content atomic percentage of NOz is E, (D/B)
Public/Granted literature
- US20140117305A1 NON-VOLATILE MEMORY ELEMENT AND MANUFACTURING METHOD THEREOF Public/Granted day:2014-05-01
Information query
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