Invention Grant
- Patent Title: Thin film transistor array substrate and method for manufacturing the same
- Patent Title (中): 薄膜晶体管阵列基板及其制造方法
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Application No.: US13491963Application Date: 2012-06-08
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Publication No.: US08823001B2Publication Date: 2014-09-02
- Inventor: Yunqi Zhang
- Applicant: Yunqi Zhang
- Applicant Address: CN Beijing CN Hefei, Anhui
- Assignee: Boe Technology Group Co., Ltd.,Hefei Boe Optoelectronics Technology Co., Ltd.
- Current Assignee: Boe Technology Group Co., Ltd.,Hefei Boe Optoelectronics Technology Co., Ltd.
- Current Assignee Address: CN Beijing CN Hefei, Anhui
- Agency: Ladas & Parry LLP
- Priority: CN201110155543 20110610
- Main IPC: H01L29/04
- IPC: H01L29/04 ; H01L29/10

Abstract:
The present disclosure discloses a method for manufacturing a TFT array substrate, comprising: depositing a gate metal layer, a gate insulating layer, a semiconductor layer and a source-drain electrode layer in this order on a base substrate, performing a first photolithograph process to form a common electrode line, a gate line, a gate electrode, a source electrode, a drain electrode and a channel defined between the source electrode and the drain electrode; depositing a passivation layer, performing a second photolithograph process to form a first via hole and a second via hole in the passivation layer; and depositing a pixel electrode layer and a data line layer in this order, perform a third photolithograph process to form a data line connected to the source electrode through the first via hole and a pixel electrode connected to the drain electrode through the second via hole.
Public/Granted literature
- US20120313101A1 THIN FILM TRANSISTOR ARRAY SUBSTRATE AND METHOD FOR MANUFACTURING THE SAME Public/Granted day:2012-12-13
Information query
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