Invention Grant
- Patent Title: Image sensors
- Patent Title (中): 图像传感器
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Application No.: US13613709Application Date: 2012-09-13
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Publication No.: US08823070B2Publication Date: 2014-09-02
- Inventor: Ihara Hisanori
- Applicant: Ihara Hisanori
- Applicant Address: KR Gyeonggi-do
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Gyeonggi-do
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: KR10-2012-0009154 20120130
- Main IPC: H01L31/113
- IPC: H01L31/113

Abstract:
In image sensors and methods of manufacturing the same, a substrate has a photoelectric conversion area, a floating diffusion area and a recess between the photoelectric conversion area and the floating diffusion area. A plurality of photodiodes is vertically arranged inside the substrate in the photoelectric conversion area. A transfer transistor is arranged along a surface profile of the substrate having the recess and configured to transfer electric charges generated from the plurality of photodiodes to the floating diffusion area. The transfer transistor includes a gate insulation pattern on a sidewall and a bottom of the recess and on a surface of the substrate around the recess, and a gate conductive pattern including polysilicon doped with impurities and positioned on the gate insulation pattern along the surface profile of the substrate having the recess, wherein a cavity is in an upper surface of the gate conductive pattern.
Public/Granted literature
- US20130193496A1 IMAGE SENSORS Public/Granted day:2013-08-01
Information query
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