Invention Grant
- Patent Title: Method for producing a semiconductor device and semiconductor device
- Patent Title (中): 半导体器件和半导体器件的制造方法
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Application No.: US13960089Application Date: 2013-08-06
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Publication No.: US08823085B2Publication Date: 2014-09-02
- Inventor: Fujio Masuoka , Hiroki Nakamura
- Applicant: Unisantis Electronics Singapore Pte. Ltd.
- Applicant Address: SG Singapore
- Assignee: Unisantis Electronics Singapore Pte. Ltd.
- Current Assignee: Unisantis Electronics Singapore Pte. Ltd.
- Current Assignee Address: SG Singapore
- Agent Laurence A. Greenberg; Werner H. Stemer; Ralph E. Locher
- Main IPC: H01L29/66
- IPC: H01L29/66 ; H01L29/78

Abstract:
A SGT-production method includes forming a fin-shaped silicon layer on a silicon substrate, forming a first insulating film around the fin-shaped silicon layer, forming a pillar-shaped silicon layer in an upper portion of the fin-shaped silicon layer, where the pillar-shaped silicon layer has the same width as the fin-shaped silicon layer, forming a gate insulating film around the pillar-shaped silicon layer, forming, around the gate insulating film, a metal film and a polysilicon film thinner than the width of the pillar-shaped silicon layer, forming a third resist for forming a gate line, performing anisotropic etching to form the gate line, depositing a fourth resist, exposing the polysilicon film on a sidewall of an upper portion of the pillar-shaped silicon layer, removing the exposed polysilicon film by etching, removing the fourth resist, removing the metal film by etching, and forming a gate electrode connecting to the gate line.
Public/Granted literature
- US20140042526A1 METHOD FOR PRODUCING A SEMICONDUCTOR DEVICE AND SEMICONDUCTOR DEVICE Public/Granted day:2014-02-13
Information query
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