Invention Grant
- Patent Title: Semiconductor device having mixedly mounted components with common film layers and method of manufacturing the same
- Patent Title (中): 具有混合安装的组件与公共薄膜层的半导体器件及其制造方法
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Application No.: US13495794Application Date: 2012-06-13
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Publication No.: US08823112B2Publication Date: 2014-09-02
- Inventor: Masaaki Shinohara
- Applicant: Masaaki Shinohara
- Applicant Address: JP Kawasaki-shi, Kanagawa
- Assignee: Renesas Electronics Corporation
- Current Assignee: Renesas Electronics Corporation
- Current Assignee Address: JP Kawasaki-shi, Kanagawa
- Agency: Womble Carlyle
- Priority: JP2011-134514 20110616
- Main IPC: H01L27/06
- IPC: H01L27/06 ; H01L49/02

Abstract:
A metal gate electrode and a poly-silicon resistance element are mixedly mounted in the same semiconductor substrate. The metal gate electrode is formed on a first gate insulating film and includes a first gate metal film and a first gate silicon film. The poly-silicon resistance element includes a silicon film pattern formed on a laminated pattern which includes a first laminate insulating film, a first laminate metal film, and a second laminate insulating film. The first laminate insulating film and the first gate insulating film are formed from a common insulating film; the first laminate metal film and the first gate metal film are formed from a common metal film, and the silicon firm pattern and the first gate silicon film are formed from a common silicon film. In a planar view, a footprint of the silicon film pattern is included within the second laminate insulating film.
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