Invention Grant
US08823112B2 Semiconductor device having mixedly mounted components with common film layers and method of manufacturing the same 有权
具有混合安装的组件与公共薄膜层的半导体器件及其制造方法

Semiconductor device having mixedly mounted components with common film layers and method of manufacturing the same
Abstract:
A metal gate electrode and a poly-silicon resistance element are mixedly mounted in the same semiconductor substrate. The metal gate electrode is formed on a first gate insulating film and includes a first gate metal film and a first gate silicon film. The poly-silicon resistance element includes a silicon film pattern formed on a laminated pattern which includes a first laminate insulating film, a first laminate metal film, and a second laminate insulating film. The first laminate insulating film and the first gate insulating film are formed from a common insulating film; the first laminate metal film and the first gate metal film are formed from a common metal film, and the silicon firm pattern and the first gate silicon film are formed from a common silicon film. In a planar view, a footprint of the silicon film pattern is included within the second laminate insulating film.
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