Invention Grant
- Patent Title: Hybrid integrated component and method for the manufacture thereof
- Patent Title (中): 混合集成组件及其制造方法
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Application No.: US13915249Application Date: 2013-06-11
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Publication No.: US08823116B2Publication Date: 2014-09-02
- Inventor: Heribert Weber
- Applicant: Heribert Weber
- Applicant Address: DE Stuttgart
- Assignee: Robert Bosch GmbH
- Current Assignee: Robert Bosch GmbH
- Current Assignee Address: DE Stuttgart
- Agency: Kenyon & Kenyon LLP
- Priority: DE102012210052 20120614
- Main IPC: H01L29/84
- IPC: H01L29/84

Abstract:
A hybrid integrated component includes: at least one ASIC element having integrated circuit elements and a back-end stack; an MEMS element having a micromechanical structure, which extends over the entire thickness of the MEMS substrate; and a cap wafer. The hybrid integrated component is provided with an additional micromechanical function. The MEMS element is mounted on the ASIC element, so that a gap exists between the micromechanical structure and the back-end stack of the ASIC element. The cap wafer is mounted above the micromechanical structure of the MEMS element. A pressure-sensitive diaphragm structure having at least one deflectable electrode of a capacitor system is implemented in the back-end stack of the ASIC element, which diaphragm structure spans a pressure connection in the rear side of the ASIC element.
Public/Granted literature
- US20130334626A1 HYBRID INTEGRATED COMPONENT AND METHOD FOR THE MANUFACTURE THEREOF Public/Granted day:2013-12-19
Information query
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