Invention Grant
US08823116B2 Hybrid integrated component and method for the manufacture thereof 有权
混合集成组件及其制造方法

  • Patent Title: Hybrid integrated component and method for the manufacture thereof
  • Patent Title (中): 混合集成组件及其制造方法
  • Application No.: US13915249
    Application Date: 2013-06-11
  • Publication No.: US08823116B2
    Publication Date: 2014-09-02
  • Inventor: Heribert Weber
  • Applicant: Heribert Weber
  • Applicant Address: DE Stuttgart
  • Assignee: Robert Bosch GmbH
  • Current Assignee: Robert Bosch GmbH
  • Current Assignee Address: DE Stuttgart
  • Agency: Kenyon & Kenyon LLP
  • Priority: DE102012210052 20120614
  • Main IPC: H01L29/84
  • IPC: H01L29/84
Hybrid integrated component and method for the manufacture thereof
Abstract:
A hybrid integrated component includes: at least one ASIC element having integrated circuit elements and a back-end stack; an MEMS element having a micromechanical structure, which extends over the entire thickness of the MEMS substrate; and a cap wafer. The hybrid integrated component is provided with an additional micromechanical function. The MEMS element is mounted on the ASIC element, so that a gap exists between the micromechanical structure and the back-end stack of the ASIC element. The cap wafer is mounted above the micromechanical structure of the MEMS element. A pressure-sensitive diaphragm structure having at least one deflectable electrode of a capacitor system is implemented in the back-end stack of the ASIC element, which diaphragm structure spans a pressure connection in the rear side of the ASIC element.
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