Invention Grant
- Patent Title: Spin torque transfer magnetic tunnel junction fabricated with a composite tunneling barrier layer
- Patent Title (中): 用复合隧道势垒层制造的自旋扭矩传递磁隧道结
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Application No.: US13344292Application Date: 2012-01-05
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Publication No.: US08823118B2Publication Date: 2014-09-02
- Inventor: Cheng T Horng , Ru-Ying Tong
- Applicant: Cheng T Horng , Ru-Ying Tong
- Applicant Address: US CA Milpitas
- Assignee: Headway Technologies, Inc.
- Current Assignee: Headway Technologies, Inc.
- Current Assignee Address: US CA Milpitas
- Agency: Saile Ackerman LLC
- Agent Stephen B. Ackerman
- Main IPC: H01L29/82
- IPC: H01L29/82 ; H01L21/8246 ; B82Y99/00

Abstract:
A STT-RAM MTJ is disclosed with a composite tunnel barrier comprised of a CoMgO layer that contacts a pinned layer and a MgO layer which contacts a free layer. A CoMg layer with a Co content between 20 and 40 atomic % is deposited on the pinned layer and is then oxidized to produce Co nanoconstrictions within a MgO insulator matrix. The nanoconstrictions control electromigration of Co into an adjoining MgO layer. The free layer may comprise a nanocurrent channel (NCC) layer such as FeSiO or a moment dilution layer such as Ta between two ferromagnetic layers. Furthermore, a second CoMgO layer or a CoMgO/MgO composite may serve as a perpendicular Hk enhancing layer formed between the free layer and a cap layer. One or both of the pinned layer and free layer may exhibit in-plane anisotropy or perpendicular magnetic anisotropy.
Public/Granted literature
- US20130175644A1 Spin Torque Transfer Magnetic Tunnel Junction Fabricated with a Composite Tunneling Barrier Layer Public/Granted day:2013-07-11
Information query
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