Invention Grant
US08823149B2 Contact landing pads for a semiconductor device and methods of making same
有权
用于半导体器件的触点着陆焊盘及其制造方法
- Patent Title: Contact landing pads for a semiconductor device and methods of making same
- Patent Title (中): 用于半导体器件的触点着陆焊盘及其制造方法
-
Application No.: US13710575Application Date: 2012-12-11
-
Publication No.: US08823149B2Publication Date: 2014-09-02
- Inventor: Frank Jakubowski , Juergen Faul
- Applicant: GlobalFoundries Inc.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee Address: KY Grand Cayman
- Agency: Amerson Law Firm, PLLC
- Main IPC: H01L23/495
- IPC: H01L23/495 ; H01L21/31

Abstract:
One device herein includes first and second spaced-apart active regions, a transistor formed in and above the first active region, wherein the transistor has a gate electrode, a conductive contact landing pad that is coupled to the second active region, wherein the contact landing pad is made of the same conductive material as the gate electrode, and a contact that is coupled to the contact landing pad. One method herein includes forming first and second spaced-apart active regions, forming a layer of gate insulation material on the active regions, performing an etching process to remove the gate insulation material formed on the second active region, performing a common process operation to form a gate electrode structure above the gate insulation material on the first active region and the contact landing pad that is conductively coupled to the second active region and forming a contact to the contact landing pad.
Public/Granted literature
- US20140159125A1 CONTACT LANDING PADS FOR A SEMICONDUCTOR DEVICE AND METHODS OF MAKING SAME Public/Granted day:2014-06-12
Information query
IPC分类: