Invention Grant
US08823819B2 Apparatus for measuring position and shape of pattern formed on sheet 有权
用于测量在片材上形成的图案的位置和形状的装置

Apparatus for measuring position and shape of pattern formed on sheet
Abstract:
An apparatus for measuring the position and shape of a pattern formed on a sheet includes a sheet on which a pattern is formed, a camera holding mechanism that is disposed perpendicular to a transportation direction of the sheet, at least one camera that is disposed such that the camera is movable in a longitudinal direction of the camera holding mechanism, and an image processing computer that processes an image picked up by the at least one camera. In the measuring apparatus, when calibration is performed, calibration is performed with reference to a picked up image of the coating pattern and a picked up image of a reference body for calibration.
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