Invention Grant
- Patent Title: Solid-state image sensor, method of manufacturing the same and camera
- Patent Title (中): 固态图像传感器,制造方法和相机
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Application No.: US13310165Application Date: 2011-12-02
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Publication No.: US08823853B2Publication Date: 2014-09-02
- Inventor: Akihiro Kawano
- Applicant: Akihiro Kawano
- Applicant Address: JP Tokyo
- Assignee: Canon Kabushiki Kaisha
- Current Assignee: Canon Kabushiki Kaisha
- Current Assignee Address: JP Tokyo
- Agency: Fitzpatrick, Cella, Harper & Scinto
- Priority: JP2010-279860 20101215; JP2011-253139 20111118
- Main IPC: H04N3/14
- IPC: H04N3/14 ; H04N5/335 ; H01L23/58

Abstract:
An image sensor includes a charge accumulation region of a first conductivity type, an isolating semiconductor region formed from an impurity semiconductor region of a second conductivity type, a channel stop region formed from an impurity semiconductor region of the second conductivity type which is located on the isolating semiconductor region, and an insulator arranged on the channel stop region. The insulator includes a first insulating portion arranged above the isolating semiconductor region via the channel stop region, a second insulating portion arranged adjacent to an outside of the first insulating portion, wherein thickness of the second insulating potion decreases with an increase in distance from the first insulating portion, and a third insulating portion formed on the first insulating portion, wherein the third insulating portion has upper and side faces connecting the upper face to an upper face of the second insulating portion.
Public/Granted literature
- US20120154658A1 SOLID-STATE IMAGE SENSOR, METHOD OF MANUFACTURING THE SAME AND CAMERA Public/Granted day:2012-06-21
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