Invention Grant
US08823948B2 System for measuring the image quality of an optical imaging system
有权
用于测量光学成像系统的图像质量的系统
- Patent Title: System for measuring the image quality of an optical imaging system
- Patent Title (中): 用于测量光学成像系统的图像质量的系统
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Application No.: US13918113Application Date: 2013-06-14
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Publication No.: US08823948B2Publication Date: 2014-09-02
- Inventor: Markus Mengel , Ulrich Wegmann , Albrecht Ehrmann , Wolfgang Emer , Reiner Clement , Ludo Mathijssen
- Applicant: Carl Zeiss SMT GmbH
- Applicant Address: DE Oberkochen
- Assignee: Carl Zeiss SMT GmbH
- Current Assignee: Carl Zeiss SMT GmbH
- Current Assignee Address: DE Oberkochen
- Agency: Fish & Richardson P.C.
- Main IPC: G01B11/02
- IPC: G01B11/02 ; G03F7/20 ; G01M11/02
Abstract:
Methods for measuring the image quality of a projection objective include providing a measuring structure on an image-side of the projection objective, providing an immersion fluid between the projection objective and the measuring structure, directing light through the projection objective and the immersion fluid to the measuring structure while shielding the measuring structure from the immersion fluid, detecting light transmitted by the measuring structure, and determining an image quality of the projection objective based on the detected light.
Public/Granted literature
- US20130293869A1 SYSTEM FOR MEASURING THE IMAGE QUALITY OF AN OPTICAL IMAGING SYSTEM Public/Granted day:2013-11-07
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