Invention Grant
- Patent Title: Systems and methods for defect scanning
- Patent Title (中): 缺陷扫描的系统和方法
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Application No.: US13551523Application Date: 2012-07-17
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Publication No.: US08826110B2Publication Date: 2014-09-02
- Inventor: Ming Jin , Fan Zhang , Lei Chen , AbdelHakim S. Alhussein
- Applicant: Ming Jin , Fan Zhang , Lei Chen , AbdelHakim S. Alhussein
- Applicant Address: US CA San Jose
- Assignee: LSI Corporation
- Current Assignee: LSI Corporation
- Current Assignee Address: US CA San Jose
- Agency: Hamilton DeSanctis & Cha
- Main IPC: H03M13/03
- IPC: H03M13/03
Abstract:
The present invention is related to systems and methods for defect scanning.
Public/Granted literature
- US20140026004A1 Systems and Methods for Defect Scanning Public/Granted day:2014-01-23
Information query
IPC分类:
