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US08826197B2 Pattern-based replacement for layout regularization 有权
基于模式的布局正则化替代

Pattern-based replacement for layout regularization
Abstract:
Methods and systems for generating a regularized integrated circuit layout are disclosed. Pattern replacement of various portions of wiring within an integrated circuit layout with a common pattern is performed in order to generate a regularized layout. The regularized layout is then subjected to additional mask data preparation processing, such as optical proximity correction.
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