Invention Grant
- Patent Title: Gas detector
- Patent Title (中): 气体探测器
-
Application No.: US13025192Application Date: 2011-02-11
-
Publication No.: US08826725B2Publication Date: 2014-09-09
- Inventor: Toshihiro Matsuno , Masaya Watanabe , Shoji Kitanoya
- Applicant: Toshihiro Matsuno , Masaya Watanabe , Shoji Kitanoya
- Applicant Address: JP Aichi
- Assignee: NGK Spark Plug Co., Ltd.
- Current Assignee: NGK Spark Plug Co., Ltd.
- Current Assignee Address: JP Aichi
- Agency: Kusner & Jaffe
- Main IPC: G01N25/30
- IPC: G01N25/30 ; G01N25/20 ; G01N25/18

Abstract:
A gas detector for use in, for example, measuring the concentration of flammable gas or detecting leakage of flammable gas. The gas detector has a gas detection element in which at least a heat-generating resistor and an insulation layer are laminated on a semiconductor substrate made of silicon while the insulation layer encloses the heat-generating resistor. The gas detector detects flammable gas on the basis of temperature and resistance of the heat-generating resistor which vary according to flammable gas. In the gas detection element, a protection layer in the form of a gas impermeable oxide film is provided on its outermost surface which comes into contact with an environmental atmosphere that contains flammable gas. Thus, alkali resistance is ensured. Since the protection layer is impermeable to gas, entry of impurities (organic silicon) contained in the environmental atmosphere into the protection layer is restrained, whereby output is stabilized and becomes accurate.
Public/Granted literature
- US20120204623A1 GAS DETECTOR Public/Granted day:2012-08-16
Information query