Invention Grant
- Patent Title: Device for resonantly driving a micromechanical system
- Patent Title (中): 用于共振驱动微机械系统的装置
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Application No.: US13259976Application Date: 2010-01-28
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Publication No.: US08826735B2Publication Date: 2014-09-09
- Inventor: Axel Franke , Frank Freund , Daniel Christoph Meisel
- Applicant: Axel Franke , Frank Freund , Daniel Christoph Meisel
- Applicant Address: DE Stuttgart
- Assignee: Robert Bosch GmbH
- Current Assignee: Robert Bosch GmbH
- Current Assignee Address: DE Stuttgart
- Agency: Kenyon & Kenyon LLP
- Priority: DE102009001856 20090325
- International Application: PCT/EP2010/051008 WO 20100128
- International Announcement: WO2010/108712 WO 20100930
- Main IPC: G01C19/56
- IPC: G01C19/56

Abstract:
A device is provided for resonantly driving a micromechanical system, which includes at least one seismic mass supported by spring vibrations, at least one drive for driving the vibration of the seismic mass and at least one element that is motionally coupled to the seismic mass. Furthermore, the device includes at least one detection element for detecting a relational parameter, that changes with the vibration of the seismic mass, between the motionally coupled element and the detection element, the detection element being equipped to cause an interruption of the vibration drive when a predetermined value of the relational parameter is reached.
Public/Granted literature
- US20120104978A1 Device for resonantly driving a micromechanical system Public/Granted day:2012-05-03
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