Invention Grant
- Patent Title: Plasma processing assemblies including hinge assemblies
- Patent Title (中): 等离子体处理组件包括铰链组件
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Application No.: US13315929Application Date: 2011-12-09
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Publication No.: US08826857B2Publication Date: 2014-09-09
- Inventor: Greg Sexton
- Applicant: Greg Sexton
- Applicant Address: US CA Fremont
- Assignee: Lam Research Corporation
- Current Assignee: Lam Research Corporation
- Current Assignee Address: US CA Fremont
- Main IPC: C23C16/50
- IPC: C23C16/50 ; H01L21/306 ; C23F1/00 ; E05D1/00 ; E05D15/50 ; E05F1/08 ; H01J37/32 ; C23C16/06 ; C23C16/22

Abstract:
In one embodiment, a plasma processing assembly may include an upper process body coupled to a hinge body and a lower process body coupled to a base hinge member. The hinge body can be pivotally engaged with the base hinge member. A self locking latch can be pivotally engaged with the base hinge member. When the hinge body is rotated around the first axis of rotation, the protruding latch engagement member can contact the self locking latch and can rotate the self locking latch around the second axis of rotation opposite to the bias direction. The self locking latch can rotate around the second axis of rotation in the bias direction and can block the hinge body from rotating around the first axis of rotation.
Public/Granted literature
- US20130126092A1 Plasma Processing Assemblies Including Hinge Assemblies Public/Granted day:2013-05-23
Information query
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