Invention Grant
- Patent Title: Methods of profiling edges and removing edge beads
- Patent Title (中): 形成边缘并去除边缘珠的方法
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Application No.: US13153834Application Date: 2011-06-06
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Publication No.: US08826926B2Publication Date: 2014-09-09
- Inventor: Michael E. Chalom , Thomas U. Boettiger
- Applicant: Michael E. Chalom , Thomas U. Boettiger
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Agency: Wells St. John P.S.
- Main IPC: B08B5/04
- IPC: B08B5/04 ; G03F7/16

Abstract:
Some embodiments include methods for removing an edge bead after a photoresist application. Basic solution may be applied to the edge bead and removed with a vacuum, with the basic solution having a pH of at least about 14. Some embodiments include methods of profiling coatings along peripheral regions of substrates. A nozzle may be positioned above a peripheral region and oriented to direct a basic solution downwardly toward the peripheral region. A suction port may be positioned laterally outward of the peripheral region. Basic solution may be ejected from the nozzle toward the peripheral region, with the basic solution having a pH of at least about 14 and dissolving coating along the peripheral region. A vacuum may be provided within the suction port to pull the basic solution and the dissolved coating from the peripheral region.
Public/Granted literature
- US20120305030A1 Methods of Profiling Edges and Removing Edge Beads Public/Granted day:2012-12-06
Information query
IPC分类: