Invention Grant
US08827400B2 Liquid application apparatus, liquid application method and imprinting system 有权
液体施用装置,液体施加方法和压印系统

Liquid application apparatus, liquid application method and imprinting system
Abstract:
A liquid application apparatus includes: a head including a plurality of nozzles which eject droplets of liquid having functional properties toward a substrate; a relative movement device which causes the head and the substrate to move relatively to each other in a relative movement direction; a droplet ejection control device which operates the head at a prescribed droplet ejection period so as to deposit the droplets discretely onto the substrate; an x-direction droplet deposition pitch changing device which changes a deposition pitch of the droplets on the substrate in an x direction perpendicular to the relative movement direction; and a y-direction droplet deposition pitch changing device which changes a deposition pitch of the droplets on the substrate in a y direction parallel to the relative movement direction.
Information query
Patent Agency Ranking
0/0