Invention Grant
US08828199B2 Supporting device for a magnetron assembly with a rotatable target
有权
用于具有可旋转靶的磁控管组件的支撑装置
- Patent Title: Supporting device for a magnetron assembly with a rotatable target
- Patent Title (中): 用于具有可旋转靶的磁控管组件的支撑装置
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Application No.: US12956546Application Date: 2010-11-30
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Publication No.: US08828199B2Publication Date: 2014-09-09
- Inventor: Goetz Teschner , Hans-Jürgen Heinrich , Harald Grune , Sven Haehne
- Applicant: Goetz Teschner , Hans-Jürgen Heinrich , Harald Grune , Sven Haehne
- Applicant Address: DE Dresden
- Assignee: VON ARDENNE Anlagentechnik GmbH
- Current Assignee: VON ARDENNE Anlagentechnik GmbH
- Current Assignee Address: DE Dresden
- Agency: Heslin Rothenberg Farley & Mesiti P.C.
- Priority: DE102009056241 20091201
- Main IPC: C23C14/34
- IPC: C23C14/34 ; H01J37/34
Abstract:
A support device for a magnetron arrangement with a rotating target includes a housing with a drive shaft mounted to rotate in the housing. An end of the drive shaft accessible from outside of the housing connects to the rotating target and another end lies within the housing for introduction of a torque. An electric motor with a stator and a rotor is arranged within the housing to generate a torque.
Public/Granted literature
- US20110147209A1 SUPPORTING DEVICE FOR A MAGNETRON ASSEMBLY WITH A ROTATABLE TARGET Public/Granted day:2011-06-23
Information query
IPC分类:
