Invention Grant
- Patent Title: Method of making aluminum oxynitride coated article
- Patent Title (中): 制造氮氧化铝涂层制品的方法
-
Application No.: US13908097Application Date: 2013-06-03
-
Publication No.: US08828492B2Publication Date: 2014-09-09
- Inventor: Volkmar Sottke , Hartmut Westphal , Hendrikus Van Den Berg , Zhigang Ban , Yixiong Liu , Mark S. Greenfield
- Applicant: Kennametal Inc.
- Applicant Address: US PA Latrobe
- Assignee: Kennametal Inc.
- Current Assignee: Kennametal Inc.
- Current Assignee Address: US PA Latrobe
- Agent Matthew W. Gordon, Esq.
- Main IPC: C23C16/30
- IPC: C23C16/30
Abstract:
A method for making a coated article wherein the method includes the following steps: providing a substrate; and depositing an aluminum oxynitride coating layer from a gaseous mixture. The gaseous mixture contains the following components: 30.0-65.0 volume percent nitrogen, 0.7-1.3 volume percent aluminum tri-chloride; 1.0-2.0 volume percent ammonia, 0.1-1.5 carbon dioxide, 1.5-4.5 volume percent hydrogen chloride, optional components of carbon monoxide and/or argon, and hydrogen as the balance.
Public/Granted literature
- US20130302521A1 METHOD OF MAKING ALUMINUM OXYNITRIDE COATED ARTICLE Public/Granted day:2013-11-14
Information query
IPC分类:
